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Custom Quartz Wafer Boat | High Temp Fused Silica Carrier for Diffusion
Precision wafer carriers for high-yield thermal processing. Custom-engineered for Diffusion, Oxidation, and LPCVD applications, our quartz boats provide a high-purity environment for 4″, 6″, 8″, and 12″ wafer processing. Featuring CNC-machined slots for micron-level accuracy and a reinforced structural design, they ensure minimal contact stress and long-term durability in high-temperature furnace operations.
Product Overview
Quartz boats are manufactured from high-purity fused quartz and are designed for high-temperature processing and precise material handling. They are widely used in semiconductor manufacturing, laboratory thermal treatment, and industrial furnace applications where thermal stability and material purity are critical. We provide custom quartz boats in various sizes, structures, and slot configurations according to application requirements or drawings.
Key Features
- Ultra-High Purity:Made from semiconductor-grade fused quartz (SiO2 >= 99.99%) to minimize contamination risk.
- Thermal Shock Resistance:Exceptional stability during rapid heating and cooling cycles.
- Structural Integrity:Maintains geometry and dimensional accuracy under continuous high-temperature conditions.
- Low Contamination:High chemical purity ensures a clean environment for delicate wafer processing.
- Durability:Engineered for repeated thermal cycling with a long operational lifespan.
Available Types of Quartz Boat
- Flat-Bottom Quartz Boats:For general thermal treatment and material testing.
- Slotted Quartz Boats:Precision-machined for secure wafer positioning.
- Multi-Slot Carriers:High-capacity designs for mass production (25, 50, or custom slots).
- Vertical & Horizontal Boats:Tailored for specific furnace orientations (LPCVD/Diffusion).
- Low Profile Boats:Designed for space-optimized furnace loading.
Applications of Quartz Boat
Quartz boats are commonly used in high-temperature and precision environments, including:
- Semiconductor wafer processing and handling
- Thermal treatment and annealing processes
- Laboratory furnace experiments
- High-temperature material testing
- Photovoltaic and electronic manufacturing
Quartz Boat vs. Ceramic Boat
Compared with ceramic alternatives, fused quartz boats offer significant advantages for high-end processing:
- Higher Purity:Drastically lower metallic impurity levels.
- Process Visibility:Superior transparency allows for better observation of the process.
- Thermal Stability:Better resistance to thermal shock and less deformation over time.
- Consistent Quality:More reliable dimensional stability during repeated heating cycles.
Technical Specifications
1. Material & Thermal Properties
| Property | Value |
| Material | High Purity Fused Quartz (SiO2 >= 99.99%) |
| Purity Grade | Semiconductor Grade |
| Density | 2.2 g/cm3 |
| Mohs Hardness | 5.5 – 6.5 |
| Softening Point | 1730°C |
| Annealing Point | 1210°C |
| Strain Point | 1120°C |
| Max. Working Temperature (Long-term) | 1150°C |
| Max. Working Temperature (Short-term) | 1300°C |
| Thermal Expansion Coefficient | 5.5 x 10^-7 cm/cm.C |
| Thermal Conductivity (20°C) | 1.4 W/m.C |
| Appearance | Transparent / Clear |
2. Customization & Application Specs
| Parameter | Standard / Supported Range |
| Supported Wafer Size | 2″, 4″, 6″, 8″, 12″ (Round or Square) |
| Number of Slots | 25, 50, or fully customized |
| Min. Slot Width | 0.5 mm (Customizable) |
| Slot Depth | Customized based on wafer thickness |
| Boat Structures | Vertical, Horizontal, Low Profile, Flat-bottom |
| Surface Finish | Fire Polished / Grinding / Polished |
Applications
- Semiconductor Industry:Wafer diffusion, oxidation, annealing, and LPCVD processes.
- Solar / Photovoltaics:High-efficiency solar cell wafer processing and handling.
- Laboratory Research:High-temperature furnace experiments and material testing.
- Electronics:Precision thermal treatment for high-performance electronic components.
Quality & Inspection
Each quartz boat undergoes a rigorous quality control process:
- Raw Material Purity:Verification of SiO2 content and impurity levels.
- Dimensional Accuracy:Precise inspection of slot spacing and overall structure.
- Surface Quality:Visual and microscopic inspection for chips, scratches, or cracks.
- Pre-shipment Cleaning:Ultrasonic cleaning and vacuum packaging to ensure “out-of-the-box” readiness.
FAQ – Quartz Boat
Q: Are quartz boats suitable for repeated high-temperature use? Yes. Their low thermal expansion and high purity make them ideal for repeated thermal cycling.
Q: Can the number of slots and spacing be customized for my specific wafers? Absolutely. We specialize in custom slot geometries and spacing based on your technical requirements.
Q: What is the maximum operating temperature? Our boats can operate continuously at 1150°C, with short-term peaks up to 1300°C.
Q: Do you provide CAD support for custom designs? Yes, our technical team supports OEM/ODM projects and can work directly from your CAD or PDF drawings.
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