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Quartz Ring & Flange | Precision Fused Silica Connectors & Seals
Precision-machined Quartz Rings and Flanges (SiO2 >= 99.99%) designed for airtight seals and structural support in extreme environments. From large-diameter furnace flanges to intricate centering rings, we provide custom fused silica solutions with micron-level tolerances and superior thermal stability for semiconductor, vacuum, and industrial applications.
Product Overview
Our Quartz Rings and Flanges are critical components for sealing and connecting high-purity systems. Manufactured from premium fused silica, these parts provide an ideal interface for vacuum chambers, diffusion furnaces, and chemical reactors where ordinary metal or plastic connectors would fail due to heat or contamination.
Whether you need a custom-drilled flange for a PECVD system or a high-precision spacer ring for optical equipment, we offer comprehensive CNC machining and fire-polishing services. Our rings and flanges ensure a contamination-free environment and maintain structural integrity under continuous high-temperature operation.
Key Features
- Ultra-High Purity:Fabricated from semiconductor-grade quartz (SiO2 >= 99.99%) to eliminate metallic impurities.
- Thermal Endurance:Maintains perfect geometry at continuous temperatures up to 1100°C.
- Exceptional Sealing:Precision-ground surfaces ensure airtight performance in high-vacuum applications.
- Chemical Inertness:Resistant to plasma etching gases and corrosive chemical vapors.
- Precision CNC Machining:Capable of complex hole patterns, interlocking grooves, and stepped profiles.
- Low Thermal Expansion:Minimizes stress on connected quartz tubes or vessels during temperature cycles.
Available Types of Quartz Rings & Flanges
- Quartz Vacuum Flanges:Designed for KF, ISO, and custom bolt-hole configurations.
- Centering & Spacer Rings:Precision-ground rings for component alignment and spacing.
- Furnace Tube Flanges:Large-diameter welded or machined flanges for diffusion furnace liners.
- Step Rings & Groove Rings:Specifically engineered for O-ring seats and interlocking seals.
- Opaque Quartz Rings:For thermal insulation and IR heat shielding applications.
Custom Manufacturing Capabilities
We provide professional fabrication based on your technical CAD drawings or physical samples:
- Dimensional Range:Supporting diameters from 10mm up to 600mm+.
- Precision Drilling:Custom bolt holes, gas inlet ports, and sensor mount cut-outs.
- Surface Finishing:Options for optically polished sealing faces or precision-ground matte finishes.
- Welding & Integration:Expert flame welding to join flanges directly onto quartz tubes or chambers.
- Tolerances:Standard +/- 0.1mm, with precision machining up to +/- 0.01mm.
Typical Applications
- Semiconductor Fabrication:Plasma etching chambers, PECVD equipment, and diffusion furnace interfaces.
- Vacuum Technology:High-purity viewports, vacuum feedthroughs, and chamber connectors.
- Photovoltaics (PV):Solar cell processing equipment and high-purity gas manifolds.
- Laboratory Systems:Custom reaction vessels and high-temperature furnace tube end-caps.
- Optical Equipment:Precision spacers and mounting rings for lens and sensor assemblies.
Technical Specifications
| Property / Item | Specification |
| Material | High-Purity Fused Quartz (SiO2 >= 99.99%) |
| Max Working Temp | 1100°C (Continuous) / 1250°C (Short-term) |
| Surface Finish | Ground, Fire-Polished, or Optically Polished |
| Machining Precision | CNC Milling, Drilling, and Slotting |
| Flatness | Up to 1/4 Lambda per inch for sealing faces |
| Chemical Resistance | Resistant to all acids except Hydrofluoric (HF) |
Quality Control & Inspection
- Dimensional Verification:Ensuring 100% compliance with CAD designs and bolt-hole alignments.
- Surface Integrity:Detailed inspection for micro-cracks, chips, or inclusions that could compromise vacuum seals.
- Annealing Process:All machined and welded flanges are fully annealed to remove internal stress.
- Cleanroom Readiness:Optional ultrasonic cleaning and vacuum packaging for immediate cleanroom installation.
FAQ – Quartz Ring & Flange
Q: Can you manufacture quartz flanges with custom bolt-hole patterns? Yes. We use 5-axis CNC machining to drill precise hole patterns and slots based on your specific equipment requirements.
Q: Are these flanges suitable for high-vacuum environments? Absolutely. Our precision-ground and polished quartz flanges are designed to provide reliable airtight seals in high-vacuum systems.
Q: What is the maximum diameter you can produce? We can manufacture custom quartz flanges and rings with diameters up to 600mm or more, depending on material availability.
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